Well it is working without an error now. I believe I also disabled "Release" which is not a benchmark. The working configuration now is ARM_HYP ON CMAKE_INSTALL_PREFIX /usr/local FASTPATH ON FAULT ON HARDWARE ON IPC ON IRQ ON IRQUSER OFF KernelArmExportPMUUser OFF KernelCustomDTS MAPPING ON MCS OFF OPENSBI_PATH .../sel4bench/projects/sel4bench/../../tools/opensbi PLATFORM x86_64 RELEASE ON SCHED OFF SIGNAL OFF SMP OFF SYNC ON Sel4benchAllowSettingsOverride OFF VCPU ON Running the created grub iso with qemu is working fine as well. Just thought I update this here in case someone else runs into this problem.